Subjects: TANTALUM; NITROGEN; HAFNIUM oxide
Record details
Subjects: THIN film transistors; PLASMA etching; CRYSTALS at low temperatures
Subjects: THIN film transistors; DIELECTRICS; SILICON
Subjects: THIN film transistors; THIN film devices; POLYCRYSTALS
Subjects: THIN film transistors; THIN film devices; TRANSISTORS
Subjects: SILICON; GROUP 14 elements; WAVEGUIDES
Subjects: THIN film transistors; POLYCRYSTALLINE semiconductors; SILICON
Subjects: SOLAR cells; SOLAR energy; SOLAR batteries