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Academic Journal

Study on the sticking materials on tools in micromilling of single crystalline silicon.

Subjects: *MANUFACTURING industries; SINGLE crystals; SILICONCHENG, X.; YANG, X. H.; ZHENG, G. M.

  • Source: International Journal of Manufacturing Technology & Management. 2017, Vol. 31 Issue 5, p460-471. 12p.

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  • 1-1 of  1 results for ""Xu R""